Automatic Wafer Unloader ZP-IV & LSP-IV

Equipment Application

ZP-IV: The ZP-IV unloader is designed to load stacked wafers into cassettes and transport them automatically to the next process step.

LSP-IV: The LSP-IV unloader is specifically tailored to load wafers from cassettes into 5-lane/8-lane/10-lane inline cleaning equipment.

Features

ZP-IV:

• PLC control ensures automatic loading process, while touch-screen operation provides ease of use and clarity.
• Equipped with double workstations to enhance working efficiency.
• Includes features such as overlapping detection, loading station with or without wafer detection, cassette positioning, and monitoring functions.
• Offers the flexibility of inline or offline operation.
• Compatible with additional functionalities like AGV, RFID, and MES functions.

LSP-IV:

• Automatic loading process facilitated by PLC control and intuitive touch-screen operation.
• Utilizes a single lane loading/unloading method to ensure productivity and meet batch production requirements.
• Features double workstations to enable uninterrupted operation during magazine/cassette exchange.
• Option for wafer breakage detection and treatment before transferring to the unloader (additional charges may apply).
• Supports additional functionalities such as AGV, RFID, and MES functions.

Parameters

These automatic wafer unloaders, ZP-IV and LSP-IV, offer efficient and reliable solutions for loading wafers into cassettes and transferring them seamlessly to subsequent process steps, ensuring smooth operation and high productivity in wafer manufacturing environments.

Benefits:

1. Efficiency: Both the ZP-IV and LSP-IV automatic wafer unloaders are designed for high efficiency, streamlining the process of loading wafers into cassettes and transferring them to the next process step. With PLC control and intuitive touch-screen operation, the loading process is automated and easy to manage.
2. Enhanced Productivity: Featuring double workstations, these unloaders allow for continuous operation during magazine/cassette exchange, maximizing productivity and minimizing downtime.
3. Flexibility: The ZP-IV and LSP-IV unloaders offer flexibility in operation, with the option for inline or offline use. This versatility allows for seamless integration into different production setups and workflows.
4. Advanced Features: Both unloaders come equipped with advanced features such as overlapping detection, cassette positioning, and monitoring functions, ensuring precise and reliable operation.
5. Compatibility: With compatibility with additional functionalities like AGV, RFID, and MES functions, these unloaders can be easily integrated into existing systems, enhancing overall automation and control.
6. Reduced Breakage: The option for wafer breakage detection and treatment in the LSP-IV unloader helps minimize the risk of damage to wafers during the loading process, ensuring higher yield and lower production costs.
7. Quality Assurance: With a low breakage rate of <= 0.03%, these unloaders ensure the integrity of the wafers throughout the loading process, maintaining quality standards and reducing waste.
8. Energy Efficiency: Both unloaders are designed for energy efficiency, with optimized power consumption and pressure requirements, contributing to overall operational cost savings.
9. Versatile Configuration: The ZP-IV unloader offers the flexibility to configure the number of lanes (5/8/10), allowing for customization to match specific production requirements and throughput needs.