Automatic Wafer Unloader

Equipment Model: DP-IV/LXP-IV

Equipment Application

DP-IV: Transfer wafers from the cassette of the previous process to the cassette of the next process.

LXP-IV: Unloading the wafers from the 5/8/10-lane inline cleaning equipment to cassettes.

Features

DP-IV

• With PLC control and the unloading process is completed automatically; Touch-screen operation, which is easy and clear.
• With single lane loading/unloading method which guarantees the loading/unloading productivity and meets the requirement of the wafer production according to batches as well.
• Double workstation, exchanging magazine/cassette no need to interrupt equipment operation.
• Inline/Offline optional.
• Compatible with AGV, RFID, MES function optional.

LXP-IV

• With PLC control and the unloading process is completed automatically; touch screen operation, which is easy and clear.
• Breakage detection and treatment before wafer unload to the unloader. (Need extra charges)
• Wafer turnover function, Weight testing function (need extra charges)
• Compatible with AGV, RFID, MES management functions.

Parameters