Equipment Model: DP-IV/LXP-IV
Equipment Application
DP-IV: Transfer wafers from the cassette of the previous process to the cassette of the next process.
LXP-IV: Unloading the wafers from the 5/8/10-lane inline cleaning equipment to cassettes.
Features
DP-IV
- With PLC control and the unloading process is completed automatically; Touch-screen operation, which is easy and clear.
- With single lane loading/unloading method which guarantees the loading/unloading productivity and meets the requirement of the wafer production according to batches as well.
- Double workstation, exchanging magazine/cassette no need to interrupt equipment operation.
- Inline/Offline optional.
- Compatible with AGV, RFID, MES function optional.
LXP-IV
- With PLC control and the unloading process is completed automatically; touch screen operation, which is easy and clear.
- Breakage detection and treatment before wafer unload to the unloader. (Need extra charges)
- Wafer turnover function, Weight testing function (need extra charges)
- Compatible with AGV, RFID, MES management functions.
Parameters
Model | DP-IV | LXP-IV |
Footprint (mm) | Varies according to different throughput | |
Breakage Rate | <=0.03% | |
Throughput | Max 10000pcs/hr | |
Cassette | 100/120pcs | |
Power Consumption | Max 15KW | Max 17KW |
Pressure of CDA | 6Bar | 6Bar |
Lanes | 5/8/10 lane | |
Voltage | 220V 380V |
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