Equipment Model: DP-IV/LXP-IV
DP-IV: Transfer wafers from the cassette of the previous process to the cassette of the next process.
LXP-IV: Unloading the wafers from the 5/8/10-lane inline cleaning equipment to cassettes.
- With PLC control and the unloading process is completed automatically; Touch-screen operation, which is easy and clear.
- With single lane loading/unloading method which guarantees the loading/unloading productivity and meets the requirement of the wafer production according to batches as well.
- Double workstation, exchanging magazine/cassette no need to interrupt equipment operation.
- Inline/Offline optional.
- Compatible with AGV, RFID, MES function optional.
- With PLC control and the unloading process is completed automatically; touch screen operation, which is easy and clear.
- Breakage detection and treatment before wafer unload to the unloader. (Need extra charges)
- Wafer turnover function, Weight testing function (need extra charges)
- Compatible with AGV, RFID, MES management functions.
|Footprint (mm)||Varies according to different throughput|
|Power Consumption||Max 15KW||Max 17KW|
|Pressure of CDA||6Bar||6Bar|