Equipment Model: SYZ-VI / SYZ-VI-B
Integrated wafer loading & unloading, unloading the wafers from the quartz boat to the cassette, or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realizes single-side diffusion or available for the single wafer in a slot for double-side diffusion. Continuous wafer loading& unloading can guarantee continuous production or be used only for wafer loading or unloading is also available.
- With an imported six-axis lift to load/unload and ensures high reliability of picking and placing of wafers; with IPC based running master computer software in HMI, high-speed data interaction can be realized by network communication.
- With precise detection components to detect the dynamic position of the quartz boat to rectify the positioning.
- A cooling system before the unloading process, which can avoid any harmful effect on the wafers and equipment caused by high temperature.
- The comb, gripper adopts special processing technology which greatly reduces the marks on wafers.
- The cassette can be vertical or horizontal, customer can choose flexibly according to their needs.
- MES function, sheet resistance detection, and AGV, optional.
|Wafer Size (mm)||156~185||210|
|Footprint (mm)||8200(L)*2180(W)*2300(H) (with AGV, 1 by 2)||8200(L)*2480(W)*2700(H) (with AGV, 1 by 2)|
|Quartz Boat Dimension||1600pcs/boat pitch 2.38||1200pcs/boat pitch 3.15|
|Throughput (SYZ-VI three-throughput optional)||11000pcs/h 12000pcs/h 13000pcs/h||10000pcs/h|
|Suitable Cassette||100pcs cassette||100pcs cassette|
|Loading Method||Square/Diamond Shape Wafer Loading|