Equipment Model: SYZ-VI / SYZ-VI-B
Equipment Usage
Integrated wafer loading & unloading, unloading the wafers from the quartz boat to the cassette, or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realizes single-side diffusion or available for the single wafer in a slot for double-side diffusion. Continuous wafer loading& unloading can guarantee continuous production or be used only for wafer loading or unloading is also available.
Features
- With an imported six-axis lift to load/unload and ensures high reliability of picking and placing of wafers; with IPC based running master computer software in HMI, high-speed data interaction can be realized by network communication.
- With precise detection components to detect the dynamic position of the quartz boat to rectify the positioning.
- A cooling system before the unloading process, which can avoid any harmful effect on the wafers and equipment caused by high temperature.
- The comb, gripper adopts special processing technology which greatly reduces the marks on wafers.
- The cassette can be vertical or horizontal, customer can choose flexibly according to their needs.
- MES function, sheet resistance detection, and AGV, optional.
Parameters
| Model | SYZ-VI | SYZ-VI-B |
| Wafer Size (mm) | 156~185 | 210 |
| Breakage Rate | <=0.03% | <=0.03% |
| Footprint (mm) | 8200(L)*2180(W)*2300(H) (with AGV, 1 by 2) | 8200(L)*2480(W)*2700(H) (with AGV, 1 by 2) |
| Quartz Boat Dimension | 1600pcs/boat pitch 2.38 | 1200pcs/boat pitch 3.15 |
| Throughput (SYZ-VI three-throughput optional) | 11000pcs/h 12000pcs/h 13000pcs/h | 10000pcs/h |
| Suitable Cassette | 100pcs cassette | 100pcs cassette |
| Loading Method | Square/Diamond Shape Wafer Loading | |
| Power Consumption | 13KW | 13KW |
Reviews
There are no reviews yet.