Automatic Wafer Handling System for PECVD

Equipment Usage

The Automatic Wafer Handling System for PECVD is an inline equipment designed to integrate seamlessly with one or two boat-boat interface PECVD (Plasma-Enhanced Chemical Vapor Deposition) systems. It facilitates the automatic transportation of graphite boats and wafers, enabling efficient loading and unloading processes. This equipment is versatile and can be utilized in various stages of the PECVD process, from pre-processing to post-processing. It automates the transfer of wafers from cassettes to graphite boats and vice versa, optimizing production workflows.

Features:

• Modular Design: The system features a modular design, allowing for seamless integration inline with one or two sets of PECVD equipment, enhancing flexibility and scalability.
• PC Control and Tablet Operation: Controlled by a PC system, the equipment offers intuitive tablet computer operation, ensuring ease of use and clear operation instructions.
• Advanced Detection Systems: Equipped with online micro-crack detection, film thickness detection, and color inspection systems, the equipment ensures high-quality output. Additionally, it includes automatic handling of non-conforming wafers, enhancing production efficiency and yield.
• Inline/Offline Configuration: The system supports both inline and offline configurations, offering versatility to adapt to different production setups and requirements.
• Compatibility: Compatible with AGV (Automated Guided Vehicle), RFID (Radio-Frequency Identification) system, and MES (Manufacturing Execution System) function, the equipment facilitates seamless integration with existing manufacturing systems, enhancing control and monitoring capabilities.

Parameters

• Model: SMZ-IV
• Wafer Size: 156~166mm
• Footprint: Varies according to different throughput requirements
• Breakdown Rate: <=0.05%
• Throughput: Maximum of 9000 pieces per hour
• Cassette Capacity: 100/120 pieces
• Graphite Boat Capacity: 416/432/448/680 pieces
• Power Consumption: 15KW/18KW

The Automatic Wafer Handling System for PECVD is designed to streamline the transportation of wafers and graphite boats, offering high throughput, advanced detection capabilities, and compatibility with industry-standard systems, ultimately enhancing the efficiency and productivity of PECVD processes.

Benefits:

1. Enhanced Automation: The automatic wafer handling system for PECVD streamlines the production process by automating the transportation of graphite boats and wafer loading/unloading, reducing the need for manual intervention and optimizing workflow efficiency.
2. Versatile Integration: With modular design and compatibility with one or two sets of PECVD equipment, this system offers versatile integration options, allowing seamless adaptation to different production setups and requirements.
3. User-Friendly Operation: Equipped with PC control and tablet computer operation, the system ensures easy and clear operation, minimizing the learning curve for operators and enhancing overall productivity.
4. Quality Assurance: Integrated online micro-crack detection, film thickness detection, and color inspection systems help ensure product quality by identifying and addressing defects in real-time, reducing the likelihood of non-conforming wafers (NG wafers).
5. Flexible Configuration: The system offers both inline and offline configuration options, providing flexibility to suit various production scenarios and preferences.
6. Interoperability: Compatible with AGV, RFID systems, and MES functions, the system facilitates seamless integration with existing production systems, enhancing control, monitoring, and data management capabilities.
7. High Throughput: With a maximum throughput of up to 9000 wafers per hour, the system offers high-speed operation, enabling efficient production output and meeting demanding manufacturing schedules.
8. Reduced Breakdowns: With a low breakdown rate of <=0.05%, the system delivers reliable performance, minimizing downtime and ensuring continuous operation.
9. Optimized Footprint: The footprint varies according to different throughput requirements, allowing for efficient space utilization in the production facility.
10. Energy Efficiency: Designed with power consumption of 15KW/18KW, the system offers energy-efficient operation, contributing to cost savings and environmental sustainability.