Automatic Wafer Handling System for DOA Equipment

Equipment Application

The SYZ-VI-B Automatic Wafer Handling System is designed to facilitate the seamless assembly and unloading of silicon wafers in DOA (Diffusion Oxidation Annealing) equipment. It offers integrated loading and unloading capabilities, allowing diffused silicon wafers to be unloaded from the quartz boat into the wafer basket, and textured silicon wafers to be loaded into the quartz boat from the wafer basket. The system supports both single-sided and double-sided diffusion technologies, with options for continuous production or separate loading and unloading operations.

Technical Features:

1. High Reliability: The system utilizes imported six-axis manipulators for loading and unloading wafers, ensuring reliable handling and placement of silicon wafers throughout the process.
2. Advanced Human-Machine Interface (HMI): The HMI incorporates an Industrial PC (IPC) to run upper software, enabling high-speed data interaction through network communication. This setup enhances operational efficiency and data management capabilities.
3. Precise Positioning: Precise detection components are employed to dynamically detect the position of the quartz boat, allowing for corrective positioning as needed. This ensures accurate alignment and placement of wafers during loading and unloading processes.
4. Cooling System: Prior to unloading, the system features a cooling system to mitigate the adverse effects of high temperature on silicon wafers and equipment. This helps maintain the integrity of the wafers and ensures optimal processing conditions.
5. Specialized Processing Technology: Key components such as top teeth and suction cups are treated with special processing technology to minimize marks and abrasions on the wafers. This improves the overall quality of wafer handling and reduces the risk of surface damage.
6. Flexible Cassette Orientation: The loading and unloading flower baskets (cassettes) can be positioned vertically or horizontally, providing flexibility to accommodate different operational setups and customer preferences.
7. Optional Functions: The system offers optional MES functionality for enhanced data management, as well as optional modules for formula resistance detection and integration with Automated Guided Vehicles (AGV). These features further enhance process control, quality assurance, and automation capabilities.

Benefits of Automatic Wafer Handling System for DOA Equipment (SYZ-VI-B)

1. Improved Operational Efficiency: The automatic handling system streamlines the assembly and unloading processes of silicon wafers in DOA equipment, reducing manual labor requirements and minimizing handling time. This results in increased operational efficiency and throughput.
2. Enhanced Reliability: Utilizing imported six-axis manipulators, the system ensures reliable and precise handling of silicon wafers throughout the loading and unloading processes. This enhances process reliability and reduces the risk of errors or damage to the wafers.
3. Advanced Human-Machine Interface: With an Industrial PC (IPC) running upper software, the system offers a user-friendly human-machine interface (HMI) for easy operation and high-speed data interaction. This simplifies operation and enhances data management capabilities.
4. Accurate Positioning: The system employs precise detection components to dynamically detect the position of the quartz boat, allowing for corrective positioning as needed. This ensures accurate alignment and placement of wafers, contributing to overall process precision.
5. Temperature Control: Featuring a cooling system before unloading, the system prevents adverse effects on silicon wafers and equipment due to high temperatures. This helps maintain the integrity of the wafers and ensures optimal processing conditions.
6. Surface Protection: Specialized processing technology is applied to key components such as top teeth and suction cups to minimize marks and abrasions on the wafers. This protects the surface integrity of the wafers and ensures high-quality handling.
7. Flexibility in Cassette Orientation: The system offers flexibility in the orientation of loading and unloading flower baskets (cassettes), allowing them to be positioned vertically or horizontally according to operational needs. This adaptability enhances workflow customization and efficiency.
8. Optional Functionality: With optional MES functionality, formula resistance detection modules, and integration with Automated Guided Vehicles (AGV), the system provides additional capabilities for enhanced data management, quality assurance, and automation. This flexibility allows for customization to specific production requirements and future scalability.