Tubular Diffusion Oxidation Annealing Furnace

Equipment name

Tubular Diffusion Oxidation Annealing Furnace Horizontal Diffusion/Oxidation/Annealing Equipment

Equipment Model

DOA-420

Equipment Application

It is mainly used for the doping of silicon wafers in the manufacture of crystalline silicon solar cells to form PN junctions.
The equipment is mainly used for doping and form PN junctions on silicon wafers in the manufacturing process of crystalline silicon solar cells.

Process Flow

Quartz boat and silicon wafer preparation→inserting→loading→selecting process operation→entering the boat→vacuuming→stabilizing the temperature→passing oxygen→passing the source→propulsion→constant temperature→out of the boat→cooling off the boat→test→unloading
Prepare quartz boat & wafers→Insert wafers→Loading wafers→Choose recipe→Boat loading→tube Vacuuming→Temperature rising→Oxygen inlet→Pocl ₃  inlet→Push in→DOA treatment→Boat unloading→Cooling→Testing→Wafer unloading

Technical Features 

1. Low pressure diffusion, oxidation and annealing functions.
Low pressure diffusion, oxidation and annealing.

2. High square resistance technical solutions.
High sheet resistance technology solution.

3. Equipped with related patented technology, it can be applied to boron diffusion process.
Patented technology, available for Boron diffusion.

4. Unique double-nested furnace door structure.
Unique double-layer-embedment furnace door structure.

5. Patented technology tail gas treatment system.
Patented technology for exhaust gas treatment system.

6. High-speed and stable overall modular boat pushing mechanism.
High-speed integral module boat pushing mechanism.

7. High-precision source voltage stabilization technology.
High precision air source pressure stabilization technology.

8. Intelligent automatic control.
Intelligent automatic control.

9. MES software with independent intellectual property rights.
MES software with independent intellectual property right.

10. Comprehensive security alarm protection functions such as anti-over-temperature, broken couple, and collision.
Alarm protection for over-heating, thermocouple -break and boat collision.

11. Match SC intelligent production management system.
Match SC smart factory solution.

Device Parameters