Tubular Diffusion Oxidation Annealing Furnace

Equipment Application:

This Horizontal Diffusion/Oxidation/Annealing Equipment is a cornerstone in the manufacturing process of crystalline silicon solar cells. Primarily utilized for doping and forming PN junctions on silicon wafers, it plays a crucial role in enhancing the efficiency and functionality of solar cells.

Process Flow:

• Preparation of quartz boat and silicon wafers
• Insertion and loading of wafers
• Selection of process operation
• Boat entry and vacuuming
• Temperature stabilization
• Introduction of oxygen and source materials
• Propulsion and maintenance of constant temperature
• Boat exit and cooling
• Testing and unloading of wafers

Technical Features:

1. Versatile Functionality: The equipment encompasses low-pressure diffusion, oxidation, and annealing capabilities, offering comprehensive solutions for various manufacturing needs.
2. Advanced Technology Solutions: Incorporating high square resistance technology, the furnace ensures precise and efficient processing of silicon wafers.
3. Patented Boron Diffusion Capability: Equipped with patented technology, the furnace enables boron diffusion processes, enhancing its applicability and versatility.
4. Innovative Design: Featuring a unique double-nested furnace door structure, the equipment optimizes thermal efficiency and facilitates smooth operation.
5. Efficient Exhaust Gas Treatment: Utilizing patented technology for tail gas treatment, the furnace maintains environmental compliance and operational safety.
6. Integrated Boat Pushing Mechanism: The high-speed and stable modular boat pushing mechanism ensures consistent and efficient processing of wafers.
7. Precision Control Technology: Incorporating high-precision source voltage stabilization and air source pressure stabilization technologies, the furnace achieves optimal processing conditions.
8. Intelligent Automation: With intelligent automatic control, the equipment streamlines operations, enhances efficiency, and minimizes human error.
9. MES Software Integration: Integrated with MES software boasting independent intellectual property rights, the furnace enables seamless data management and process optimization.
10. Comprehensive Safety Features: The furnace is equipped with comprehensive security alarm protection functions, including anti-over-temperature, broken thermocouple, and collision detection, ensuring operational safety and reliability.
11. Smart Factory Integration: Compatible with SC intelligent production management systems, the furnace contributes to the advancement of smart factory solutions, enhancing overall manufacturing efficiency and productivity.

Benefits of Tubular Diffusion Oxidation Annealing Furnace

1. Enhanced Efficiency: The furnace facilitates precise doping and formation of PN junctions on silicon wafers, leading to improved efficiency and performance of crystalline silicon solar cells.
2. Versatile Functionality: With capabilities for low-pressure diffusion, oxidation, and annealing, the furnace offers versatile solutions, catering to various manufacturing requirements and processes.
3. Optimized Processing: Advanced technology solutions, including high square resistance technology and patented boron diffusion capability, ensure precise and efficient processing of silicon wafers, leading to high-quality outcomes.
4. Innovative Design Features: The unique double-nested furnace door structure enhances thermal efficiency and operational convenience, contributing to smoother workflow and reduced energy consumption.
5. Environmental Compliance: Utilizing patented technology for tail gas treatment, the furnace ensures efficient exhaust gas treatment, maintaining environmental compliance and promoting sustainable manufacturing practices.
6. Operational Efficiency: The integration of intelligent automation and MES software with independent intellectual property rights streamlines operations, minimizes errors, and enhances overall efficiency in production processes.
7. Safety Assurance: Comprehensive security alarm protection functions, such as anti-over-temperature, broken thermocouple, and collision detection, ensure operational safety, protecting both equipment and personnel.
8. Process Control Precision: High-precision source voltage stabilization and air source pressure stabilization technologies ensure precise control over processing conditions, leading to consistent and high-quality results.
9. Reliability and Consistency: The furnace’s stable and high-speed modular boat pushing mechanism ensures consistent processing of wafers, contributing to reliable and consistent manufacturing output.
10. Integration with Smart Factory Solutions: Compatibility with SC intelligent production management systems facilitates seamless integration into smart factory environments, enhancing overall manufacturing efficiency, and productivity.
11. Cost Savings: By optimizing processing efficiency, reducing material wastage, and minimizing downtime through advanced automation and control features, the furnace helps to reduce manufacturing costs and improve profitability.