Tubular Plasma Alumina Deposition Furnace

Equipment Name

Tubular plasma alumina deposition furnace Horizontal PECVD (AlO _x  )

Equipment Model
PD-520

Equipment Application

This equipment is mainly used to deposit an aluminum oxide passivation dielectric film through N ₂ O and TMA on the back of the silicon wafer, increase the voltage and current, and then deposit a silicon nitride protective film on the surface of the aluminum oxide film.

Deposit AlO _x passivition dielectric film on the rear side of wafers using N ₂ O and TMA gas to increase voltage and current of the solar cell and then deposit Six _N y _protective film on the surface of the AlO _x film.

Process Flow

Preparation of graphite boat and silicon wafer → nitrogen filling in the tube → entering the boat → vacuuming and pressure testing → deposition of alumina composite film → vacuuming and pressure testing → clearing the pipeline, filling nitrogen → withdrawing the boat

graphite boat & wafers ready→Nitrogen inlet→graphite boat load in→vacuumize, pressure test→deposit AlO _x film→vacuumize, pressure test→tube cleaning and Nitrogen inlet→graphite boat unload

Technical Features

1. Aluminum oxide, silicon oxynitride, silicon nitride composite film PERC technology.
AlO _x , SiO _x N _y and SiN _x complex layers.

2. Compatible with silicon nitride and silicon oxynitride PERC technology.
Compatible with SiN _x and SiO _x N _y PERC process.

3. Double water cooling sealing technology.
Double water-cooled sealing technology .

4. Patented internal heating technology.
Patented internal heating technology.

5. High-speed and stable overall modular boat pushing mechanism.
High-speed integral module boat pushing mechanism.

6. Suspended carrying boat technology.
Graphite boat contact-free with quartz tube.

7. MES software with independent intellectual property rights.
MES software with independent intellectual property right.

8. Self-developed central computer centralized control system.
Independently developed CCC system.

9. Rapid coating technology.
Fast coating technology.

10. Comprehensive security alarm protection functions such as anti-over-temperature, broken couple, and collision.
Alarm protection for over-heating, thermocouple -break and boat collision.

Device Parameters