Automatic graphite boat loading and unloading machine

Equipment Name

Automatic Wafer Handling System for PECVD 

Equipment Model

SMZ-IV

Equipment  Application

This equipment is on-line and can be connected with one or two side boat equipments to realize automatic transfer of graphite boats and automatic loading and unloading of silicon wafers. The wafers are automatically loaded into the graphite boat, and the graphite boat is transported to the PECVD equipment, or the graphite boat in the PECVD equipment is transported to this equipment, and the silicon wafers in the graphite boat are automatically loaded into the wafer basket.

Inline equipment, which can be integrated with one or two boat-boat interface PECVD equipment and realize the transportation of graphite boat and wafers load & unload automatically. This equipment can be applied in the process before and after PECVD process, which can load the wafers from the cassette to the graphite boat and transport the fulfilled boat to the PECVD equipment or transport the processed boat to this equipment and unload the wafers from the graphite boat to the cassette automatically.

Technical Features

1. The equipment is modularly designed, and one or two PECVDs can be connected online.
With modular design, which can inline integrated with one or two sets of PECVD equipment.

2. It is controlled by PC, and the menu operation of tablet computer is simple and clear.
With PC control,tablet computer operation,which is easy and clear for operation.

3. It has the functions of online crack detection, online film thickness detection, online color difference detection, online CCD warped film detection and NG film automatic processing (optional function, the price is extra).
Online micro-crack detection,film thickness detection,color inspection system ,online CCD wafer warpage detection and automatic dealing with NG wafers(need extra charges).

4. Online/offline configuration.
Inline/offline configuration.

5. Matching AGV, RFID, optional MES function.

Compatible with AGV,RFID system,MES function optional.

Device Parameters