HJT reactive plasma coating equipment

Equipment Application:

• The primary application of the equipment lies in the preparation of transparent conductive films, particularly in the deposition of Transparent Conductive Layers (TCO).

Equipment Process:

• The RPD utilizes a low-energy, high-density electron beam sublimation target to generate high dissociation rate ions, which are then plated onto the substrate surface.
• The high free state target ions, sublimated by the low energy electron beam, recombine on the substrate, forming a high-quality film.

Technical Features:

1. Preferred Choice of Top Solar Cell Manufacturer: Recognized as the sole RPD equipment selected by the world’s leading heterojunction solar cell manufacturer, emphasizing its superiority in the field.
2. High Indium Dissociation Rate: Achieves an indium dissociation rate exceeding 80%, resulting in the production of high-quality transparent conductive films (TCO).
3. Minimal Ion Bombardment: The coating process ensures ion bombardment of less than 30eV, preserving the integrity of the amorphous silicon film and maintaining optimal interface characteristics.
4. Enhanced Carrier Mobility: With high carrier mobility and low carrier concentration, the equipment ensures excellent conductivity and high long-wavelength transmittance.
5. High Carrier Mobility Materials: Utilizes target materials such as IWO with carrier mobility reaching up to 80cm²/V·s, and ICO with the potential for carrier mobility as high as 130cm²/V·s.
6. Superior Efficiency: Long-term mass production verification by heterojunction manufacturers demonstrates that solar cells produced with RPD exhibit a 0.4% higher efficiency compared to those manufactured by other devices.
7. Customization Options: Offers flexibility in equipment configuration, providing both linear and loop RPD equipment tailored to suit customer production line requirements.

Benefits of HJT Reactive Plasma Deposition (RPD) Equipment

1. Superior Coating Quality: The RPD equipment offers high dissociation rate ions and low-energy coating processes, ensuring superior coating quality without damaging the substrate surface. This results in high-quality transparent conductive films with excellent interface characteristics.
2. Enhanced Efficiency: With the capability to achieve a dissociation rate of over 80% for indium, the equipment produces high-quality transparent conductive films (TCO), leading to enhanced efficiency in solar cell manufacturing.
3. Preservation of Substrate Integrity: The RPD equipment’s coating process involves minimal ion bombardment (less than 30eV), safeguarding the integrity of the amorphous silicon film and maintaining optimal interface characteristics, thereby reducing defects and improving overall performance.
4. Improved Conductivity: By ensuring high carrier mobility and low carrier concentration, the equipment facilitates excellent conductivity and high long-wavelength transmittance, contributing to the efficiency and performance of solar cells.
5. Flexibility and Customization: The equipment offers customization options, including linear and loop configurations, allowing manufacturers to tailor the equipment to their specific production line requirements, enhancing operational flexibility and efficiency.
6. Proven Efficiency Gains: Long-term mass production verification by heterojunction manufacturers demonstrates that solar cells produced with RPD equipment exhibit a 0.4% higher efficiency compared to those manufactured by other devices, providing tangible efficiency gains and competitive advantages.
7. Reliability and Consistency: With its precision coating technology verified through extensive long-term mass production, the RPD equipment ensures reliability and consistency in the manufacturing process, reducing variability and ensuring high-quality output consistently.
8. Industry Recognition: As the preferred choice of the world’s top heterojunction solar cell manufacturer, the RPD equipment enjoys industry recognition and validation, signifying its superior performance and reliability in solar cell manufacturing.
9. Cost Efficiency: By minimizing material wastage and defects through precise coating processes and maintaining high efficiency, the RPD equipment contributes to cost savings in manufacturing operations, enhancing overall profitability.
10. Environmental Sustainability: The RPD equipment’s efficient coating processes and high-quality output contribute to environmental sustainability by reducing resource consumption, waste generation, and environmental impact associated with solar cell manufacturing.