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Tubular plasma polysilicon film deposition furnace
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HomeSolar Cell ManufacturingTubular plasma polysilicon film deposition furnace Tubular plasma polysilicon film deposition furnace
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Tubular plasma polysilicon film deposition furnace

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Category: Tubular plasma polysilicon film deposition furnace Tags: Solar cell manufacturing, Tubular plasma polysilicon film deposition furnace
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Description

Tubular plasma polysilicon film deposition furnace

Equipment Application

This furnace serves as a crucial tool for fabricating thin film layers essential for N-TOPCon and TOPCon solar cells. It enables the precise deposition of tunnel oxide layers, intrinsic poly-Si, doped poly-Si, and mask layers, critical for enhancing solar cell performance.

Process Flow

The equipment’s operation involves a series of meticulously coordinated steps, starting from the preparation of graphite boats and silicon wafers to the final withdrawal of the boats after deposition. The process includes nitrogen filling, vacuuming, pressure testing, multilayer composite film deposition, and pipeline cleaning.

Technical Features:

  1. In-Situ Thin Film Deposition: The furnace facilitates the simultaneous deposition of tunnel oxide layer, intrinsic poly-Si, doped poly-Si, and mask layer in one operation, streamlining the production process and enhancing efficiency.
  2. In-Situ Cleaning Function: With built-in cleaning capabilities, the furnace ensures a clean deposition environment, optimizing film quality and reliability.
  3. Double Water Cooling Sealing: This innovative technology enhances the furnace’s reliability and stability by maintaining optimal operating temperatures.
  4. Patented Internal Heating Technology: The furnace incorporates advanced heating mechanisms to achieve precise temperature control, essential for uniform film deposition.
  5. High-Speed Modular Boat Pushing: Featuring a high-speed integral module boat pushing mechanism, the furnace maximizes production throughput while ensuring stable and consistent operation.
  6. Suspended Carrying Boat Technology: Graphite boats are held in place without physical contact with the quartz tube, minimizing wear and contamination.
  7. MES Software with Independent Intellectual Property: The furnace is equipped with proprietary MES software for comprehensive process monitoring and control, enabling real-time adjustments and optimizations.
  8. Self-Developed Central Computer Control System: The central computer control system, developed in-house, offers advanced control capabilities and ensures seamless integration with the manufacturing process.
  9. Rapid Coating Technology: The furnace incorporates fast coating technology, reducing processing time and enhancing productivity.
  10. Comprehensive Security Alarm Protection: Various safety features, including anti-over-temperature, thermocouple-break, and boat collision protection, safeguard equipment integrity and operator safety.

Benefits:

  1. Efficient Multilayer Deposition: The tubular plasma polysilicon film deposition furnace enables the in-situ deposition of multiple thin films required for N-TOPCon solar cells, including tunnel oxide layer, intrinsic poly-Si, doped poly-Si, and mask layer. This streamlined process reduces the need for multiple equipment setups, saving time and resources.
  2. In-Situ Cleaning Function: With its in-situ cleaning function, the furnace ensures the cleanliness of the deposition environment, minimizing contamination and defects in the deposited films. This feature contributes to consistent film quality and enhances the reliability of the solar cells produced.
  3. Advanced Sealing and Heating Technology: The furnace incorporates double water cooling sealing technology and patented internal heating technology, ensuring precise temperature control and maintaining a stable deposition environment. These advancements improve process reliability and result in high-quality film deposition.
  4. High-Speed Modular Boat Pushing Mechanism: Equipped with a high-speed and stable modular boat pushing mechanism, the furnace optimizes the deposition process by facilitating rapid and uniform coating of the silicon wafers. This enhances production efficiency and throughput, leading to increased productivity.
  5. Suspended Carrying Boat Technology: The furnace utilizes suspended carrying boat technology, ensuring that the graphite boat remains contact-free with the quartz tube during operation. This minimizes wear and tear, prolongs equipment lifespan, and reduces maintenance requirements.
  6. Integrated MES Software: With its MES software featuring independent intellectual property rights, the furnace offers advanced process monitoring and control capabilities. This software enables comprehensive management of the deposition process, enhancing operational efficiency and product consistency.
  7. Rapid Coating Technology: The furnace incorporates rapid coating technology, allowing for quick deposition of thin films while maintaining high quality and uniformity. This feature accelerates production cycles, reduces lead times, and improves overall manufacturing efficiency.
  8. Comprehensive Safety Features: Equipped with a range of security alarm protection functions, including anti-over-temperature, broken couple, and collision detection, the furnace ensures safe and reliable operation. These safety features help prevent equipment damage and protect personnel, enhancing workplace safety.
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