Tubular plasma polysilicon film deposition furnace

Equipment Name

Tubular plasma polysilicon film deposition furnace Horizontal PECVD (poly-Si)
Equipment Model

PD-520

Equipment Application

This equipment is mainly used for the preparation of tunnel oxide layer, intrinsic poly-si, doped poly-si and mask layer in N-TOPCon cells.

This equipment is mainly used for the deposition of tunnel oxide layer, intrinsic poly-si layer, poly-si layer doping and mask layer for TOPCon solar cells.

Process Flow

Graphite boat and silicon wafer preparation → nitrogen filling in the tube → entering the boat → vacuuming, pressure testing → deposition of multilayer composite films → vacuuming, pressure testing → cleaning pipeline, nitrogen filling → boat withdrawal

Graphite boat & wafers ready→nitrogen inlet→graphite boat load in→vacuumize, pressure test→multi layers deposition→vacuumize, pressure test→Pipe purging, nitrogen inlet→graphite boat unload

Technical Features

1. Tunneling oxide layer, intrinsic poly-Si, doped poly-Si, mask layer, four process thin films are completed in-situ at one time.

Tunnel oxide layer, intrinsic Poly-Si, doping Poly-Si, mask layer, four processes completed in one in-situ doping.

2, with in-situ cleaning function.
With in-situ clean.

3. Double water cooling sealing technology.
Double water-cooled sealing technology.

4. Patented internal heating technology.
Patented internal heating technology.

5. High-speed and stable overall modular boat pushing mechanism.
High-speed integral module boat pushing mechanism.

6. Suspended carrying boat technology.
Graphite boat contact-free with quartz tube.

7. MES software with independent intellectual property rights.
MES software with independent intellectual property right.

8. Self-developed central computer centralized control system.

Independently developed CCC system.

9. Rapid coating technology.
Fast coating technology.

10. Comprehensive security alarm protection functions such as anti-over-temperature, broken couple, and collision.

Alarm protection for over-heating, thermocouple-break and boat collision.

Device Parameters