Tubular plasma polysilicon film deposition furnace

Equipment Application

This furnace serves as a crucial tool for fabricating thin film layers essential for N-TOPCon and TOPCon solar cells. It enables the precise deposition of tunnel oxide layers, intrinsic poly-Si, doped poly-Si, and mask layers, critical for enhancing solar cell performance.

Process Flow

The equipment’s operation involves a series of meticulously coordinated steps, starting from the preparation of graphite boats and silicon wafers to the final withdrawal of the boats after deposition. The process includes nitrogen filling, vacuuming, pressure testing, multilayer composite film deposition, and pipeline cleaning.

Technical Features:

1. In-Situ Thin Film Deposition: The furnace facilitates the simultaneous deposition of tunnel oxide layer, intrinsic poly-Si, doped poly-Si, and mask layer in one operation, streamlining the production process and enhancing efficiency.
2. In-Situ Cleaning Function: With built-in cleaning capabilities, the furnace ensures a clean deposition environment, optimizing film quality and reliability.
3. Double Water Cooling Sealing: This innovative technology enhances the furnace’s reliability and stability by maintaining optimal operating temperatures.
4. Patented Internal Heating Technology: The furnace incorporates advanced heating mechanisms to achieve precise temperature control, essential for uniform film deposition.
5. High-Speed Modular Boat Pushing: Featuring a high-speed integral module boat pushing mechanism, the furnace maximizes production throughput while ensuring stable and consistent operation.
6. Suspended Carrying Boat Technology: Graphite boats are held in place without physical contact with the quartz tube, minimizing wear and contamination.
7. MES Software with Independent Intellectual Property: The furnace is equipped with proprietary MES software for comprehensive process monitoring and control, enabling real-time adjustments and optimizations.
8. Self-Developed Central Computer Control System: The central computer control system, developed in-house, offers advanced control capabilities and ensures seamless integration with the manufacturing process.
9. Rapid Coating Technology: The furnace incorporates fast coating technology, reducing processing time and enhancing productivity.
10. Comprehensive Security Alarm Protection: Various safety features, including anti-over-temperature, thermocouple-break, and boat collision protection, safeguard equipment integrity and operator safety.